Pivotal Systems

Pivotal Systems provides process matching solutions for the semiconductor industry.

Pivotal Systems Corp. provides process matching solutions for the semiconductor industry. It offers Omega3.0 end point system for di-electric etch processes, as well as a fault detection system to prevent etch-stop and wafer mis-processing events. The company also provides GasFlowMonitor, a precise in situ monitor for the detection of gas flow variations; and AsherFD active endpoint and fault detection system for remote and non-remote plasma source PR strip/ash. In addition, it offers LeakDetect for the in situ detection of low level atmospheric leaks due to o-ring seal failures for CVD and etch chambers; CleanEP active endpoint for HDP-CVD in situ dry cleans; and ToolTrace Diagnostics, a diagnostic hardware/software package for data visualization and chamber matching. Pivotal Systems Corp. was founded in 2003 and is based in Pleasanton, California.